表面和薄膜過程導(dǎo)論

Preface
Chapter 1 Introduction to surface processes
1.1 Elementary thermodynamic ideas of surfaces
1.2 Suface energies and the Wulff throrem
1.3 Thermodynamics versus kinetics
1.4 Introduction to surface and adsorbate reconstructions
1.5 Introduction to surface electronics
Further reading for chapter1
Problems for chapter 1
Chapter 2 Surfaces in vacuum ultra-high vacuum techniques and processes
2.1 Kinetic thery concepts
2.2 Vacum concepts
2.3 UHV hardware:pumps,tubes,materials and pressure measureent
2.4 Surface rpeparation and cleaning procedures in situ experiments
2.5 Thin film deposition procedures:sources of information
Further reading for chapter2
Problems for chapter2
Chapter 3 Electron-based techniques for examinnig surface and thin film processes
3.1 Classification of suface and microsopy techniques
3.2 Diffraction and quasi-elastie scattering techniques
3.3 Inlastic scattering techniques;chemical and electronic state information
3.4 Quantification of Auger spectra
3.5 Microsopy-spectroscopy SEM SAM SPM etc.
Further reading for chapter3
Problems talks and projects for chapter 3
Chapter 4 Surface processes in adsorption
Chapter 5 Surface processes in epitaxial growth
Chapter 6 Electronic structure and processes at metalic surfaces
Chapter 7 Semiconductor surfaces and interfaces
Chapter 8 Surface procces in thin film devices
Chapter 9 Postscript-where do we go from here?
Rerferences
Index