Preface 1. An Overview:Concepts,Units,and the Bohr Atom 1.1 Introduction 1.2 Nomenclature 1.3 Energies,Units,and Particles 1.4 Particle-Wave Duality and Lattice Spacing 1.5 The Bohr Model Problems 2. Atomic Collisions and Backscattering Spectrometry 2.1 Introduction 2.2 Kinematics of Elastic Collisions 2.3 Rutherford Backscattering Spectrometry 2.4 Scattering Cross Section and Impact Parameter 2.5 Central Force Scattering 2.6 Scattering Cross Section:Two-Body 2.7 Deviations from Rutherford Scattering at Low and High Energy 2.8 Low-Energy Ion Scattering 2.9 Forward Recoil Spectrometry 2.10 Center of Mass to Laboratory Transformation Problems 3. Energy Loss of Light Ions and Backscattering Depth Profiles 3.1 Introduction 3.2 General Picture of Energy Loss and Units of Energy Loss 3.3 Energy Loss of MeV Light Ions in Solids 3.4 Energy Loss in Compounds Bragg's Rule 3.5 The Energy Width in Backscattering 3.6 The Shape of the Backscattering Spectrum 3.7 Depth Profiles with Rutherford Scattering 3.8 Depth Resolution and Energy-Loss Straggling 3.9 Hydrogen and Deuterium Depth Profiles 3.10 Ranges of H and He Ions 3.11 Sputtering and Limits to Sensitivity 3.12 Summary of Scattering Relations Problems 4. Sputter Depth Profiles and Secondary Ion Mass Spectroscopy 4.1 Introduction 4.2 Sputtering by Ion Bombardment—General Concepts 4.3 Nuclear Energy Loss 4.4 Sputtering Yield 4.5 Secondary Ion Mass Spectroscopy (SIMS) 4.6 Secondary Neutral Mass Spectroscopy (SNMS) 4.7 Preferential Sputtering and Depth Profiles 4.8 Interface Broadening and Ion Mixing 4.9 Thomas-Fermi Statistical Model of the Atom Problems 5. Ion Channeling 5.1 Introduction 5.2 Channeling in Single Crystals 5.3 Lattice Location of Impurities in Crystals 5.4 Channeling Flux Distributions 89 5.5 Surface Interaction via a Two-Atom Model 5.6 The Surface Peak 5.7 Substrate Shadowing:Epitaxial Au on Ag(111) 5.8 Epitaxial Growth 5.9 Thin Film Analysis Problems 6. Electron-Electron Interactions and the Depth Sensitivity of Electron Spectroscopies 6.1 Introduction 6.2 Electron Spectroscopies:Energy Analysis 6.3 Escape Depth and Detected Volume 6.4 Inelastic Electron-Electron Collisions 6.5 Electron Impact Ionization Cross Section 6.6 Plasmons 6.7 The Electron Mean Free Path 6.8 Influence of Thin Film Morphology on Electron Attenuation 6.9 Range of Electrons in Solids 6.10 Electron Energy Loss Spectroscopy (EELS) 6.11 Bremsstrahlung Problems 7. X-ray Diffraction 7.1 Introduction 7.2 Bragg's Law in Real Space 7.3 Coefficient of Thermal Expansion Measurements 7.4 Texture Measurements in Polycrystalline Thin Films 7.5 Strain Measurements in Epitaxial Layers 7.6 Crystalline Structure 7.7 Allowed Reflections and Relative Intensities Problems 8. Electron Diffraction 8.1 Introduction 8.2 Reciprocal Space 8.3 Laue Equations 8.4 Bragg's Law 8.5 Ewald Sphere Synthesis 8.6 The Electron Microscope 8.7 Indexing Diffraction Patterns Problems 9. Photon Absorption in Solids and EXAFS 9.1 Introduction 9.2 The Schrodinger Equation 9.3 Wave Functions 9.4 Quantum Numbers,Electron Configuration,and Notation 9.5 Transition Probability 9.6 Photoelectric Effect Square-Well Approximation 9.7 Photoelectric Transition Probability for a Hydrogenic Atom 9.8 X-ray Absorption 9.9 Extended X-ray Absorption Fine Structure (EXAFS) 9.10 Time-Dependent Perturbation Theory Problems 10. X-ray Photoelectron Spectroscopy 10.1 Introduction 10.2 Experimental Considerations 10.3 Kinetic Energy of Photoelectrons 10.4 Photoelectron Energy Spectrum 10.5 Binding Energy and Final-State Effects 10.6 Binding Energy Shifts—Chemical Shifts 10.7 Quantitative Analysis Problems 11. Radiative Transitions and the Electron Microprobe 11.1 Introduction 11.2 Nomenclature in X-Ray Spectroscopy 11.3 Dipole Selection Rules 11.4 Electron Microprobe 11.5 Transition Rate for Spontaneous Emission 11.6 Transition Rate for Kα Emission in Ni 11.7 Electron Microprobe:Quantitative Analysis 11.8 Particle-Induced X-Ray Emission (PIXE) 11.9 Evaluation of the Transition Probability for Radiative Transitions 11.10 Calculation of the Kβ/Kα Ratio Problems 12. Nonradiative Transitions and Auger Electron Spectroscopy 12.1 Introduction 12.2 Auger Transitions 12.3 Yield of Auger Electrons and Fluorescence Yield 12.4 Atomic Level Width and Lifetimes 12.5 Auger Electron Spectroscopy 12.6 Quantitative Analysis 12.7 Auger Depth Profiles Problems 13. Nuclear Techniques:Activation Analysis and Prompt Radiation Analysis 13.1 Introduction 13.2 Q Values and Kinetic Energies 13.3 Radioactive Decay 13.4 Radioactive Decay Law 13.5 Radionuclide Production 13.6 Activation Analysis 13.7 Prompt Radiation Analysis Problems 14. Scanning Probe Microscopy 14.1 Introduction 14.2 Scanning Tunneling Microscopy 14.3 Atomic Force Microscopy Appendix 1. Km for 4He+ as Projectile and Integer Target Mass Appendix 2. Rutherford Scattering Cross Section of the Elements for 1 MeV4Hei Appendix 3. 4He+ Stopping Cross Sections Appendix 4. Electron Configurations and Ionization Potentials of Atoms Appendix 5. Atomic Scattering Factors Appendix 6. Electron Binding Energies Appendix 7. X-Ray Wavelengths (nm) Appendix 8. Mass Absorption Coefficient and Densities Appendix 9. KLL Auger Energies (eV) Appendix 10. Table of the Elements Appendix 11. Table of Fluoresence Yields for K,L,and M Shells Appendix 12. Physical Constants,Conversions,and Useful Combinations Appendix 13. Acronyms Index