Unit 1 A Brief Introduce to Microelectronic Technology 1 1.1 History About Microelectronics 1 Text 1 Technical words and Phrases 2 Notes to the text 3 Exercises 3 1.2 Introduction To Some Courses 5 Text 5 Technical words and Phrases 6 Notes to the text 7 Exercises 7 1.3 Reading Materials 8 1.4 Unit Exercises 10 Unit 2 Semiconductor Device 18 2.1 Semiconductor Diode 18 Text 18 Technical words and Phrases 22 Notes to the text 23 Exercises 23 2.2 Transistors 24 Text 25 Technical words and phrases 27 Notes to the text 28 Exercises 28 2.3 Microwave and Photonic devices 30 Text 30 Technical words and Phrases 34 Notes to the text 35 Exercises 35 2.4 Reading Materials 37 2.5 Unit Exercises 39 Unit 3 Micro-electronic Technology 43 3.1 Crystal Growth 43 Text 43 Technical words and Phrases 44 Notes to the text 45 Exercises 45 3.2 Film Growth 46 Text 46 Technical words and Phrases 47 Exercises 48 3.3 Photolithography 48 Text 49 Technical words and Phrases 50 Exercises 50 3.4 Oxide Growth 51 Text 51 Technical words and Phrases 53 Exercises 53 3.5 Diffusion and Ion Implantation 54 Text 54 Technical words and Phrases 56 Notes to the text 57 Exercises 57 3.6 Etching 58 Text 58 Technical words and Phrases 60 Notes to the text 60 Exercises 61 3.7 Reading Material 61 3.8 Unit Exercises 64 Unit 4 Integrated Circuits 67 4.1 Introduction of Integrated Circuits 67 Text 67 Technical words and Phrases 71 Notes to the text 72 Exercises 72 4.2 Integrated circuit design and verification 74 Text 74 Technical words and Phrases 79 Notes to the text 80 Exercises 80 4.3 Introduction of Cadence Tools 81 Text 81 Technical words and Phrases 94 Notes to the text 95 Exercises 95 4.4 Reading Materials 96 4.5 Unit Exercises 99 Unit 5 Microelectronic Mechanical Systems (MEMS) 104 5.1 Introduction to MEMS 104 Text 104 Technical words and Phrases 106 Notes to the text 107 Exercises 107 5.2 Materials for MEMS 108 Text 108 Technical words and Phrases 111 Notes to the text 111 Exercises 111 5.3 Processes for Micromachining 113 Text 113 Technical words and Phrases 116 Notes to the text 116 Exercises 116 5.4 Reading Materials 118 5.5 Unit Exercises 119 Unit 6 Scientific and Technological Papers 123 6.1 Film Thickness Tester 123 Text 123 Technical words and Phrases 128 Notes to the text 129 Exercises 129 6.2 WL13A0G10 Test System Option Manual 130 Text 130 Technical words and Phrases 133 Notes to the text 133 Exercises 134 6.3 Reading Materials 134 6.4 Unit Exercises 137 Appendix Technical Vocabulary 141 Reference 151
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